CMP Pad Conditioners

3M CMP pad conditioners are optimized for extended pad and disk life

Image of 3M CMP Pad Conditioners3M diamond, soft-brush, and micro replicated chemical mechanical planarization (CMP) pad conditioners are engineered to meet the most demanding process requirements. Using precisely engineered, micro replicated, diamond-coated ceramic structures, 3M Trizact™ pad conditioners provide excellent, highly consistent disk-to-disk performance for the most demanding advanced node processes. The diamond pad conditioners use a 3M exclusive sintered abrasive technology to provide a powerful chemical and mechanical bond between diamonds and substrate, helping keep diamonds intact and in place for consistent long-term conditioning performance.

Features
  • Used for a broad range of CMP processes and process steps
  • Optimized for extended pad and disk life
  • Broad range of solutions for different pad hardnesses, slurries, and process requirements
  • Long pad and disk life can help reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Customizable conditioning aggressiveness
Applications
  • CMP
  • Chemical mechanical polishing
  • Wafer manufacturing
  • Advanced node (memory and logic)
  • Hard disk drive manufacturing

Diamond Pad Conditioners

ImageManufacturer Part NumberDescriptionAvailable QuantityPriceView Details
New Product
3M DIAMOND PAD CONDITIONER A3799
A37993M DIAMOND PAD CONDITIONER A379915 - Immediate$199.01View Details
New Product
3M DIAMOND PAD CONDITIONER X181C
X181C3M DIAMOND PAD CONDITIONER X181C10 - Immediate$225.99View Details
New Product
3M DIAMOND PAD CONDITIONER X253C
X253C3M DIAMOND PAD CONDITIONER X253C10 - Immediate$225.99View Details
New Product
3M DIAMOND PAD CONDITIONER X252S
X252S3M DIAMOND PAD CONDITIONER X252S0 - Immediate$225.99View Details
New Product
3M DIAMOND PAD CONDITIONER X150C
X150C3M DIAMOND PAD CONDITIONER X150C0 - Immediate$225.99View Details
New Product
3M DIAMOND PAD CONDITIONER X251S
X251S3M DIAMOND PAD CONDITIONER X251S0 - Immediate$225.99View Details
New Product
3M DIAMOND PAD CONDITIONER A7101
A71013M DIAMOND PAD CONDITIONER A71010 - Immediate$261.78View Details
New Product
3M DIAMOND PAD CONDITIONER S122,
S1223M DIAMOND PAD CONDITIONER S122,8 - Immediate$327.55View Details
New Product
3M DIAMOND PAD CONDITIONER B138L
B138L3M DIAMOND PAD CONDITIONER B138L10 - Immediate$327.55View Details
New Product
3M DIAMOND PAD CONDITIONER A189H
A189H3M DIAMOND PAD CONDITIONER A189H10 - Immediate$342.36View Details
New Product
3M DIAMOND PAD CONDITIONER A189L
A189L3M DIAMOND PAD CONDITIONER A189L10 - Immediate$342.64View Details
New Product
3M DIAMOND PAD CONDITIONER A2813
A28133M DIAMOND PAD CONDITIONER A28138 - Immediate$342.64View Details
New Product
3M DIAMOND PAD CONDITIONER A3700
A37003M DIAMOND PAD CONDITIONER A37000 - Immediate$367.74View Details

Diamond Pad Conditioners - C Series

ImageManufacturer Part NumberDescriptionAvailable QuantityPriceView Details
New Product
3M DIAMOND PAD CONDITIONER C280-
C280-S3M DIAMOND PAD CONDITIONER C280-9 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CONDITIONER C260-
C260-S3M DIAMOND PAD CONDITIONER C260-10 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CONDITIONER C SER
C260-A, 4.25 IN3M DIAMOND PAD CONDITIONER C SER10 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CONDITIONER C SER
C250-A3M DIAMOND PAD CONDITIONER C SER10 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CONDITIONER C SER
C250-S3M DIAMOND PAD CONDITIONER C SER0 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CONDITIONER C SER
C280-A3M DIAMOND PAD CONDITIONER C SER9 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CON C SERIES, C21
C2120-S3M DIAMOND PAD CON C SERIES, C2110 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CON C SERIES, C21
C2120-A3M DIAMOND PAD CON C SERIES, C2110 - Immediate$314.64View Details
New Product
3M DIAMOND PAD CON C SERIES, C21
C2160-S3M DIAMOND PAD CON C SERIES, C2110 - Immediate$314.64View Details

Trizact™ Pad Conditioners

ImageManufacturer Part NumberDescriptionAvailable QuantityPriceView Details
New Product
3M TRIZACT PAD CONDITIONER, B75-
B75-2990-5S23M TRIZACT PAD CONDITIONER, B75-9 - Immediate$450.84View Details
New Product
3M TRIZACT PAD CONDITIONER, B5-M
B5-M990-5S23M TRIZACT PAD CONDITIONER, B5-M10 - Immediate$450.84View Details
New Product
3M TRIZACT PAD CONDITIONER B25-2
B25-2910-5S23M TRIZACT PAD CONDITIONER B25-210 - Immediate$474.67View Details
New Product
3M TRIZACT PAD CONDITIONER B6-19
B6-1900-5S23M TRIZACT PAD CONDITIONER B6-1910 - Immediate$474.67View Details
New Product
3M TRIZACT PAD CONDITIONER T SER
B6T-1900-5S23M TRIZACT PAD CONDITIONER T SER10 - Immediate$488.19View Details
New Product
3M TRIZACT PAD COND B25T-2910-5S
B25T-2910-5S23M TRIZACT PAD COND B25T-2910-5S10 - Immediate$488.19View Details
New Product
3M TRIZACT PAD COND B5T-2910-5S2
B5T-2910-5S23M TRIZACT PAD COND B5T-2910-5S210 - Immediate$298.77View Details
Published: 2025-10-02